Effects of low-temperature-buffer, rf-power, and annealing on structural and optical properties of ZnO/Al2O3(0001) thin films grown by rf-magnetron sputtering

标题
Effects of low-temperature-buffer, rf-power, and annealing on structural and optical properties of ZnO/Al2O3(0001) thin films grown by rf-magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 2, Pages 023511
出版商
AIP Publishing
发表日期
2009-07-18
DOI
10.1063/1.3176497

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