Validation of the microelectromechanical system flux concentrator concept for minimizing the effect of 1/f noise

With the microelectromechanical system (MEMS) flux concentrator, we have been able to increase the operating frequency of small magnetic sensors above the region where 1/f noise dominates. The device accomplished this by modulating the field via the oscillatory motion of flux concentrators on MEMS flaps. Electrostatic comb drives were used to drive the MEMS flaps. We have demonstrated an increase in the signal to noise ratio at 1 Hz, that the power signal correctly depends on V(4) where V is the amplitude of the voltage energizing the comb drives, and that the signal increases dramatically with vacuum packaging. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3076497]