Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

标题
Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 11, Pages 113305
出版商
AIP Publishing
发表日期
2009-06-09
DOI
10.1063/1.3091279

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