Aluminum incorporation in Ti1−xAlxN films studied by x-ray absorption near-edge structure

标题
Aluminum incorporation in Ti1−xAlxN films studied by x-ray absorption near-edge structure
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 11, Pages 113521
出版商
AIP Publishing
发表日期
2009-06-11
DOI
10.1063/1.3139296

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