期刊
JOURNAL OF APPLIED PHYSICS
卷 105, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3055400
关键词
annealing; decomposition; dielectric thin films; leakage currents; permittivity; strontium compounds; X-ray diffraction
SrZrO3 (SZO) thin films were deposited on (111) Pt/Ti/SiO2/Si substrates via metal organic decomposition method at different temperatures in flowing oxygen or nitrogen atmospheres. The microstructures of the films were characterized by x-ray diffraction. The dielectric properties and the leakage characteristics were investigated as well. The results showed that nitrogen ambient was helpful for the SZO films to crystallize into perovskite phase with polycrystalline structure. Meanwhile, the electric properties varying with annealing conditions were discussed in detail.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据