4.6 Article

SnO2 thick films for room temperature gas sensing applications

期刊

JOURNAL OF APPLIED PHYSICS
卷 106, 期 12, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3273323

关键词

aggregation; crystal structure; differential thermal analysis; field emission electron microscopy; gas sensors; insulating thin films; nanofabrication; nanoparticles; porous materials; powder technology; scanning electron microscopy; semiconductor materials; sol-gel processing; tin compounds; transmission electron microscopy; X-ray diffraction

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  1. IUAC, New Delhi

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Porous nanosized SnO2 powder has been synthesized by a simple nonaqueous sol gel method using SnCl2 center dot 2H(2)O and C2H5OH as precursors. Thermal stabilization of the gel is investigated by thermogravimetric/differential thermal analysis. SnO2 powder has been obtained by calcining the gel at 500 degrees C for 3 h and studied for its structural properties using x-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and transmission electron microscopy (TEM). XRD observations confirm the formation of rutile structured SnO2. On an average, 35 nm size particles have been found in TEM micrographs of SnO2 powder. FESEM of the powder reveals the formation of a porous network formed by weak aggregation of nanoparticles. An attempt has been made to fabricate gas sensor by depositing thick SnO2 films on glass substrate. Gas sensing studies show that the sensing response of SnO2 sensor toward ammonia is comparatively higher at room temperature as compared to that toward acetone and ethanol.

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