The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation

标题
The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfOxNy prepared by in situ nitridation
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 6, Pages 064111
出版商
AIP Publishing
发表日期
2008-09-23
DOI
10.1063/1.2978360

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