Transition behavior of surface morphology evolution of Si(100) during low-energy normal-incidence Ar+ ion bombardment

标题
Transition behavior of surface morphology evolution of Si(100) during low-energy normal-incidence Ar+ ion bombardment
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 3, Pages 033512
出版商
AIP Publishing
发表日期
2008-02-08
DOI
10.1063/1.2837101

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