Structural and electrochemical impedance spectroscopic studies on reactive magnetron sputtered titanium oxynitride (TiON) thin films

标题
Structural and electrochemical impedance spectroscopic studies on reactive magnetron sputtered titanium oxynitride (TiON) thin films
作者
关键词
-
出版物
JOURNAL OF APPLIED ELECTROCHEMISTRY
Volume 41, Issue 6, Pages 751-756
出版商
Springer Nature
发表日期
2011-03-31
DOI
10.1007/s10800-011-0294-z

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