4.5 Article

Contrast matching of an Si substrate with polymer films by anomalous dispersion at the Si K absorption edge

期刊

JOURNAL OF APPLIED CRYSTALLOGRAPHY
卷 45, 期 -, 页码 119-121

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INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S002188981105206X

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grazing-incidence small-angle X-ray scattering; anomalous scattering; block copolymers; soft X-rays

资金

  1. [2010-G075]

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Anomalous dispersion at the Si K absorption edge has been used to control the reflection from the interface between a film and an Si substrate, which otherwise complicates the nanostructure analysis of such a film, particularly for the soft-matter case, in grazing-incidence small-angle scattering. Such a reflectionless condition has been chosen for a triblock copolymer thin film, and two-dimensional grazing-incidence small-angle scattering patterns were obtained without the effect of the reflection. The present approach is useful for analysing nanostructures without introducing complicated corrections arising from the reflection.

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