Anatase thin films by ultrasonic spray pyrolysis

TiO2 thin films were deposited on glass slides using ultrasonic spray pyrolysis at 400 degrees C for times in the range 30-120 min. All of the films consisted of fully dense polycrystalline anatase. The first-order growth kinetics were determined to be 11 nm/min, which is similar to those of other thin-film fabrication methods. Optical transmission data showed that the films were highly transparent and that they could be differentiated into two types: The two thinner films (420 and 690 nm thickness) were smoother and more transparent while the two thicker films (1000 and 1290 nm thickness) were rougher and more translucent. (C) 2010 Elsevier B.V. All rights reserved.