期刊
JOURNAL OF ALLOYS AND COMPOUNDS
卷 578, 期 -, 页码 425-430出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2013.06.007
关键词
Palladium membrane; Sputtering method; Intermetallic diffusion barrier; Hydrogen separation; Porous nickel support
资金
- Korea Institute of Energy Technology Evaluation and Planning (KETEP) under the Energy Efficiency & Resources Programs of the Ministry of Knowledge Economy, Republic of Korea [2011201020005A]
- Korea Evaluation Institute of Industrial Technology (KEIT) [2011201020005A] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
A ceramic barrier was introduced onto the surface of a porous nickel support (PNS) to prevent intermetallic diffusion. Al2O3 and ZrO2 were deposited on the PNS by RF sputtering to a thickness of 200 nm. Pd and Au were then deposited by DC and RF sputtering with thicknesses of 3 mu m and 0.5 mu m, respectively, on the PNS with the diffusion barrier. The permeation measurement was carried out using hydrogen and helium at 723 K and a pressure difference of 100-2000 kPa. The gas permeation tests confirmed that the hydrogen permeation flux increased with increasing pressure difference and reached 4.07 mol m(-2) s(-1) at 2000 kPa with an H-2/He selectivity of more than 5000. The ZrO2 barrier membrane provided a flux of 1.5 times higher than that achieved by the Al2O3 barrier membrane. The sputtering method was successful in depositing intermetallic diffusion barriers and Pd-Au alloy layers. (c) 2013 Elsevier B.V. All rights reserved.
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