Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering

标题
Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering
作者
关键词
-
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 537, Issue -, Pages 318-322
出版商
Elsevier BV
发表日期
2012-05-24
DOI
10.1016/j.jallcom.2012.05.018

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