期刊
JOURNAL OF ALLOYS AND COMPOUNDS
卷 489, 期 1, 页码 99-102出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2009.09.020
关键词
ZnO; Magnetron sputtering; Hydrothermal method; Crystal growth
资金
- National Science Foundation for Distinguished Young Scholars of China [60825407]
- National Natural Science Foundation of China [60877025]
- Beijing Science and Technology Committee Project [Z08000303220803]
- Beijing Natural Science Foundation [2092024]
Well-aligned ZnO nanorod arrays were synthesized by hydrothermal method on Si substrates that were covered with pre-deposited ZnO films as seed layers. The ZnO seed layers were deposited by RF magnetron sputtering. It is found that the seed layers prepared under different oxygen partial pressure sputtering parameters and annealing treatment have a great influence on the morphology of the ZnO nanorod arrays grown subsequently on them. Furthermore, growth positions of nanorod/microrod arrays were selectively controlled on the lithography-assist ZnO seed layer. (C) 2009 Elsevier B.V. All rights reserved.
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