Fabrication of High-Q Nanobeam Photonic Crystals in Epitaxially Grown 4H-SiC

标题
Fabrication of High-Q Nanobeam Photonic Crystals in Epitaxially Grown 4H-SiC
作者
关键词
-
出版物
NANO LETTERS
Volume 15, Issue 9, Pages 6202-6207
出版商
American Chemical Society (ACS)
发表日期
2015-08-26
DOI
10.1021/acs.nanolett.5b02542

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