Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
出版年份 2018 全文链接
标题
Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
作者
关键词
-
出版物
JOM
Volume -, Issue -, Pages -
出版商
Springer Nature America, Inc
发表日期
2018-09-25
DOI
10.1007/s11837-018-3141-4
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