High DC sensitivity of VOxbolometer thin films on Si3N4/SiO2membranes fabricated by metal–organic decomposition

出版年份 2014 全文链接

标题

High DC sensitivity of VOxbolometer thin films on Si3N4/SiO2membranes fabricated by metal–organic decomposition

作者

关键词

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出版物

JAPANESE JOURNAL OF APPLIED PHYSICS

Volume 53, Issue 6, Pages 068009

出版商

Japan Society of Applied Physics

发表日期

2014-05-29

DOI

10.7567/jjap.53.068009

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