Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr0.3,Ti0.7)O3Thin Films on Microelectromechanical Systems Microcantilevers

标题
Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr0.3,Ti0.7)O3Thin Films on Microelectromechanical Systems Microcantilevers
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 9S1, Pages 09KA01
出版商
IOP Publishing
发表日期
2013-10-23
DOI
10.7567/jjap.52.09ka01

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