Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films Using Solution of Zinc Acetate

标题
Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films Using Solution of Zinc Acetate
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 1S, Pages 01AC11
出版商
IOP Publishing
发表日期
2013-01-24
DOI
10.7567/jjap.52.01ac11

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