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Deposition of Ag(In,Ga)Se2 Solar Cells by a Modified Three-Stage Method Using a Low-Temperature- Deposited Ag-Se Cap Layer

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IOP PUBLISHING LTD
DOI: 10.7567/JJAP.52.055801

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  1. New Energy and Industrial Technology Development Organization (NEDO)

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Ag(In,Ga)Se-2 (AIGS) films with a uniform Ag depth profile were successfully deposited by a modified three-stage method in which a Ag-Se layer was pre deposited at a low temperature (350 degrees C) before a high-temperature process at around 600 degrees C. The Ag-Se layer acted as a cap layer and effectively prevented the desorption of In from the films during the high-temperature process. The In/(In+Ga) ratio of the AIGS films was found to be about 0.15. The best AIGS solar cell deposited by this method showed an active area conversion efficiency of 10.7%. (C) 2013 The Japan Society of Applied Physics

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