Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

标题
Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue -, Pages 09LD11
出版商
Japan Society of Applied Physics
发表日期
2012-09-21
DOI
10.1143/jjap.51.09ld11

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