Temperature Dependence of Oxygen Diffusion and Crystal Structure for Thermally Oxidized Titanium Thin Films

标题
Temperature Dependence of Oxygen Diffusion and Crystal Structure for Thermally Oxidized Titanium Thin Films
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 1, Pages 015604
出版商
Japan Society of Applied Physics
发表日期
2012-01-12
DOI
10.1143/jjap.51.015604

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