A Low-Voltage and High Uniformity Nano-Electro-Mechanical System Tunable Color Filter Based on Subwavelength Grating

标题
A Low-Voltage and High Uniformity Nano-Electro-Mechanical System Tunable Color Filter Based on Subwavelength Grating
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 11S, Pages 11PA01
出版商
Japan Society of Applied Physics
发表日期
2013-12-21
DOI
10.7567/jjap.51.11pa01

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