Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

标题
Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue -, Pages 11PA02
出版商
Japan Society of Applied Physics
发表日期
2012-11-20
DOI
10.1143/jjap.51.11pa02

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