Distribution of Phosphorus Atoms and Carrier Concentrations in Single-Crystal Silicon Doped by Catalytically Generated Phosphorous Radicals

出版年份 2013 全文链接

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作者

关键词

出版物

Volume 51, Issue 6R, Pages 061301

出版商

Japan Society of Applied Physics

发表日期

2013-12-21

DOI

10.7567/jjap.51.061301

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