Fabrication of Zero-Mode Waveguide by Ultraviolet Nanoimprint Lithography Lift-Off Process

标题
Fabrication of Zero-Mode Waveguide by Ultraviolet Nanoimprint Lithography Lift-Off Process
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 6, Pages 06GK07
出版商
Japan Society of Applied Physics
发表日期
2011-06-20
DOI
10.1143/jjap.50.06gk07

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