Molecular Dynamics of Ion Incident Angle Dependence of Sputtering Yield in Chlorine-Adsorbed GaN Crystal

标题
Molecular Dynamics of Ion Incident Angle Dependence of Sputtering Yield in Chlorine-Adsorbed GaN Crystal
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 8S1, Pages 08JG03
出版商
Japan Society of Applied Physics
发表日期
2013-12-21
DOI
10.7567/jjap.50.08jg03

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