Optical AlxTi1-xOyFilms Grown by Plasma Enhanced Atomic Layer Deposition

标题
Optical AlxTi1-xOyFilms Grown by Plasma Enhanced Atomic Layer Deposition
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 8, Pages 6934-6937
出版商
Japan Society of Applied Physics
发表日期
2008-08-22
DOI
10.1143/jjap.47.6934

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