Sputtering Yield as a Function of Incident Ion Energy and Angle in Wurtzite-Type GaN Crystal

出版年份 2008 全文链接

标题

Sputtering Yield as a Function of Incident Ion Energy and Angle in Wurtzite-Type GaN Crystal

作者

关键词

-

出版物

JAPANESE JOURNAL OF APPLIED PHYSICS

Volume 47, Issue 3, Pages 1536-1540

出版商

Japan Society of Applied Physics

发表日期

2008-03-16

DOI

10.1143/jjap.47.1536

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