Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing

标题
Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 12, Pages 8771-8778
出版商
Japan Society of Applied Physics
发表日期
2008-12-19
DOI
10.1143/jjap.47.8771

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