Structure and Optical Properties of Silicon Oxycarbide Films Deposited by Reactive RF Magnetron Sputtering Using a SiC Target

标题
Structure and Optical Properties of Silicon Oxycarbide Films Deposited by Reactive RF Magnetron Sputtering Using a SiC Target
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 11, Pages 8287-8290
出版商
Japan Society of Applied Physics
发表日期
2008-11-15
DOI
10.1143/jjap.47.8287

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started