Size effect on the dynamic analysis of electrostatically actuated micro-actuators

标题
Size effect on the dynamic analysis of electrostatically actuated micro-actuators
作者
关键词
Strain Gradient, Step Voltage, Couple Stress Theory, Gradient Elasticity, Beam Length
出版商
Springer Nature
发表日期
2015-12-29
DOI
10.1007/s00542-015-2788-9

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