Mass-produced polyethylene-terephthalate film coated with tantalum pentoxide for pH measurement under ISFET detection configuration

标题
Mass-produced polyethylene-terephthalate film coated with tantalum pentoxide for pH measurement under ISFET detection configuration
作者
关键词
Develop Sensor, Tantalum Pentoxide, Ta2O5 Film, Excellent Material Property, Ta2O5 Layer
出版商
Springer Nature
发表日期
2015-02-24
DOI
10.1007/s00542-015-2474-y

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