Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

(2015) D Dezest et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

(2015) Etienne Herth et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

(2014) Darius Virzonis et al.   MICROCHIMICA ACTA

Detecting response of microelectromechanical resonators by microwave reflectometry

(2013) B. Legrand et al.   APPLIED PHYSICS LETTERS

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

(2013) Z Xiong et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

(2013) T. Dargent et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Packageless AlN/ZnO/Si Structure for SAW Devices Applications

(2012) Ouarda Legrani et al.   IEEE SENSORS JOURNAL

Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode

(2012) V. Ruiz et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Wafer level packaging compatible with millimeter-wave antenna

(2011) E. Herth et al.   SENSORS AND ACTUATORS A-PHYSICAL

Circularly Polarized Millimeter-Wave Antenna Using 0-Level Packaging

(2010) Etienne Herth et al.   IEEE Antennas and Wireless Propagation Letters

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

(2010) E. Herth et al.   MICROELECTRONIC ENGINEERING

Materials selection procedure for RF-MEMS

(2009) G. Guisbiers et al.   MICROELECTRONIC ENGINEERING

Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

(2009) Tomás Manzaneque et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Simulation and laser vibrometry characterization of piezoelectric AlN thin films

(2008) J. Hernando et al.   JOURNAL OF APPLIED PHYSICS