Surface and interfacial study of half cycle atomic layer deposited Al2O3 on black phosphorus

标题
Surface and interfacial study of half cycle atomic layer deposited Al2O3 on black phosphorus
作者
关键词
Black phosphorus, Black-P, ALD, Half-cycle, Phosphorene, 2D semiconductors
出版物
MICROELECTRONIC ENGINEERING
Volume 147, Issue -, Pages 1-4
出版商
Elsevier BV
发表日期
2015-04-11
DOI
10.1016/j.mee.2015.04.014

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