Effects of surface passivation on top-down ZnO nanowire transistors

标题
Effects of surface passivation on top-down ZnO nanowire transistors
作者
关键词
Depletion mode, Field effect transistor, Nanowire, Remote plasma atomic layer deposition (RPALD), Passivation, ZnO
出版物
MICROELECTRONIC ENGINEERING
Volume 145, Issue -, Pages 91-95
出版商
Elsevier BV
发表日期
2015-03-31
DOI
10.1016/j.mee.2015.03.013

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