Nano electron source fabricated by beam-induced deposition and its unique feature

标题
Nano electron source fabricated by beam-induced deposition and its unique feature
作者
关键词
Electron beam induced deposition, Focused ion beam induced deposition, Vacuum nanoelectronics, Field emission
出版物
MICROELECTRONIC ENGINEERING
Volume 132, Issue -, Pages 74-82
出版商
Elsevier BV
发表日期
2014-10-14
DOI
10.1016/j.mee.2014.10.004

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