Critical cutting thickness in ultra-precision machining of single crystal silicon

出版年份 2012 全文链接

标题

作者

关键词

Critical cutting thickness, Ultra-precision turning, Single crystal silicon, Brittle–ductile transition mechanism

出版物

Volume 65, Issue 5-8, Pages 843-851

出版商

Springer Nature

发表日期

2012-05-17

DOI

10.1007/s00170-012-4222-0

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