Femtosecond laser-induced simultaneous surface texturing and crystallization of a-Si:H thin film: morphology study

标题
Femtosecond laser-induced simultaneous surface texturing and crystallization of a-Si:H thin film: morphology study
作者
关键词
Femtosecond laser, Surface texturing, a-Si:H, Thin film
出版物
出版商
Springer Nature
发表日期
2012-06-20
DOI
10.1007/s00170-012-4291-0

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