Development of a pad conditioning simulation module with a diamond dresser for CMP applications

出版年份 2010 全文链接

标题

Development of a pad conditioning simulation module with a diamond dresser for CMP applications

作者

关键词

-

出版物

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Volume 50, Issue 1-4, Pages 1-12

出版商

Springer Nature

发表日期

2010-01-22

DOI

10.1007/s00170-009-2488-7

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

© Peeref 2019-2024. All rights reserved.