Preparation of ZnO nanostructures by RF-magnetron sputtering on thermally oxidized porous silicon substrate for VOC sensing application

标题
Preparation of ZnO nanostructures by RF-magnetron sputtering on thermally oxidized porous silicon substrate for VOC sensing application
作者
关键词
ZnO nanostructure, Oxidized PS, RF-sputtering, VOC sensing application
出版物
MEASUREMENT
Volume 59, Issue -, Pages 248-257
出版商
Elsevier BV
发表日期
2014-10-01
DOI
10.1016/j.measurement.2014.08.011

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