Use of Multifunctional Carboxylic Acids and Hydrogen Peroxide To Improve Surface Quality and Minimize Phosphine Evolution During Chemical Mechanical Polishing of Indium Phosphide Surfaces

标题
Use of Multifunctional Carboxylic Acids and Hydrogen Peroxide To Improve Surface Quality and Minimize Phosphine Evolution During Chemical Mechanical Polishing of Indium Phosphide Surfaces
作者
关键词
-
出版物
INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH
Volume 52, Issue 31, Pages 10664-10672
出版商
American Chemical Society (ACS)
发表日期
2013-07-09
DOI
10.1021/ie400689q

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