1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators

标题
1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators
作者
关键词
-
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2010-01-08
DOI
10.1109/tuffc.1382

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