Ferroelectric and piezoelectric responses of (110) and (001)-oriented epitaxial Pb(Zr 0.52 Ti 0.48 )O 3 thin films on all-oxide layers buffered silicon
Ferroelectric and piezoelectric responses of (110) and (001)-oriented epitaxial Pb(Zr 0.52 Ti 0.48 )O 3 thin films on all-oxide layers buffered silicon
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关键词
A. Thin films, B. Epitaxial growth, B. Laser deposition, B. Piezoelectricity, D. Ferroelectricity
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