Multichannel microchemical reactor comprising replica-molded microplasma devices:: Chemiluminescence and sulfur deposition in Ar/CS2 flows

Microchemical reactors consisting of parallel linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 x 10 arrays of 400-mu m-diameter devices with 125-mu m-wide gas flow channels have been conducted in rare gas and Ar/CS2 (lows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence (lambda similar to 505 nm) resulting from the (A) over tilde -> (X) over tilde transition of CS2+ and the deposition of a (C-S)(n) microstructured polymer have been observed in the Ar/CS2 now experiments.