Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging

标题
Formation and Expansion Phases of an Atmospheric Pressure Glow Discharge in a PECVD Reactor via Fast ICCD Imaging
作者
关键词
-
出版物
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 36, Issue 4, Pages 968-969
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2008-08-14
DOI
10.1109/tps.2008.924622

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