Thermal Characterization of $\hbox{Si}_{3}\hbox{N}_{4}$ Thin Films Using Transient Thermoreflectance Technique

标题
Thermal Characterization of $\hbox{Si}_{3}\hbox{N}_{4}$ Thin Films Using Transient Thermoreflectance Technique
作者
关键词
-
出版物
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 56, Issue 8, Pages 3238-3243
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-05-27
DOI
10.1109/tie.2009.2022078

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