A Conductive AFM Nanoscale Analysis of NBTI and Channel Hot-Carrier Degradation in MOSFETs

标题
A Conductive AFM Nanoscale Analysis of NBTI and Channel Hot-Carrier Degradation in MOSFETs
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 61, Issue 9, Pages 3118-3124
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2014-08-20
DOI
10.1109/ted.2014.2341315

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