Characterization of Edge Fringing Effect on the $C$ –$V$ Responses From Depletion to Deep Depletion of MOS(p) Capacitors With Ultrathin Oxide and High-$\kappa$ Dielectric

标题
Characterization of Edge Fringing Effect on the $C$ –$V$ Responses From Depletion to Deep Depletion of MOS(p) Capacitors With Ultrathin Oxide and High-$\kappa$ Dielectric
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 59, Issue 3, Pages 565-572
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-12-30
DOI
10.1109/ted.2011.2178605

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