Monte Carlo Simulation of Leakage Currents in $ \hbox{TiN/ZrO}_{2}/\hbox{TiN}$ Capacitors

标题
Monte Carlo Simulation of Leakage Currents in $ \hbox{TiN/ZrO}_{2}/\hbox{TiN}$ Capacitors
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 58, Issue 2, Pages 327-334
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2010-12-10
DOI
10.1109/ted.2010.2090158

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